Air preparation
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Positive-Negative Pressure Union Filter 

- With the same convenience as the conventional vacuum filters (VFU series), the filter can be used in the positive pressure as well.
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R: Resin, M: Metal, S: Sealing
Hollow Fiber Membrance Filter 

- By adopting the hollow fiber to the filter, the filtration accuracy of 0.01μm and, trapping efficiency of 99.99% has been realized.
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R: Resin, M: Metal, S: Sealing
Air Filter 

- Air filter is designed for draining and removal of foreign matter. (Element filtering capacity :5μm)
Mist Filter 

- Mist filter is designed removal of foreign matter as well as oil mist.( Element filtering capacity :0.3μm)
Micromist Filter 

- Micromist filter is designed for removal of foreign matter as well as oil mist. (Element filtering capacity :0.01μm)
Filter Regulator 

- The filter regulator is a regulator combined with a filter for removal of drainage and foreign material.