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External Vacuum Controller VIP RoHS Compliant


Fluid medium Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range 0.3~0.7MPa
Working vacuum range -90~0kPa
Operating temp. range 5~50ºC (No freezing)
Operating humidity rang 35~85%RH (No freezing)
Vibration /Impact resistance Max. 50m/s2 / Max. 150m/s2
Protective structure Equivalent to IEC IP40
Lubrication Not required
Proof pressure (Air supply circuit) 1.05MPa
Proof pressure (Vacuum circuit) 0.2Mpa

* Proof pressure does not indicate the pressure by which products operate normally but the pressure products does not break down.

Applicable size

■Vacuum port tube diameter

MM size (mm) ø1.8, ø3, ø4

■Air supply port Tube diameter

MM size (mm) ø4, ø6, ø8

■Vacuum supply port Tube diameter

MM size (mm) ø4, ø6, ø8
  • Details
  • Degital catalog
  • CAD data


Built-in flow sensor type (Industry's first) is added to the lineup. Conventional pressure sensor mount type and no pressure sensor type are also prepared.
Recommendable to semiconductor related equipment (chip mounter and handler) and vacuum transfer equipment for miniature work piece.

  • Ultra small yet large vacuum flow control is possible.8.5L/min[ANR] at vacuum supply -80kPa
  • Vacuum break airflow control method is selectable.Not only a built-in vacuum break airflow control needle valve model but also cost effective built-in fixed vacuum break airflow model is also available. (At 0.5MPa air supply, over 9.5L/min[ANR])

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